DocumentCode
3534960
Title
An electrostatic in-plane rotational MEMS micro-scanner
Author
Mu, Xiaojing ; Zhou, Guangya ; Du, Yu ; Kumar, A. Sentil ; Chau, Fook Siong ; Yu, Hongbin ; Tsai, Julius Ming-Lin
Author_Institution
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fYear
2012
fDate
6-9 Aug. 2012
Firstpage
240
Lastpage
241
Abstract
The paper presents an electrostatic in-plane rotational MEMS micro-scanner for circumferential scanned endoscopic optical coherence tomography probe. A diamond-turning-soft-lithography technology is introduced for six-slanted-facets pyramidal polygon micro-reflector fabrication.
Keywords
electrostatic actuators; endoscopes; micro-optics; optical scanners; optical tomography; soft lithography; circumferential scanned endoscopic optical coherence tomography probe; diamond turning soft lithography technology; electrostatic in-plane rotational MEMS microscanner; six slanted facets pyramidal polygon microreflector fabrication; Electrostatics; Micromechanical devices; Optical device fabrication; Optical fibers; Optical reflection; Probes; MEMS; optical coherence tomography; pyramidal polygon reflector;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2012 International Conference on
Conference_Location
Banff, AB
ISSN
2160-5033
Print_ISBN
978-1-4577-1511-2
Type
conf
DOI
10.1109/OMEMS.2012.6318892
Filename
6318892
Link To Document