DocumentCode
3537106
Title
Dependence of surface resistivity on the thickness of vanadium films
Author
Maslov, D.M. ; Oleynik, A.S.
Author_Institution
Saratov State Tech. Univ., Saratov, Russia
fYear
2012
fDate
19-20 Sept. 2012
Firstpage
332
Lastpage
335
Abstract
Was studied dependence of the resistivity of the film of vanadium on its thickness. The aim was to film spraying of vanadium thickness of several tens of nanometers. Control of the thickness of deposited films of vanadium was carried out using the resistive method.
Keywords
metallic thin films; spray coating techniques; surface resistance; vanadium; V; deposited films; resistive method; spraying; surface resistivity; vanadium film thickness;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2012 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4673-2096-2
Type
conf
DOI
10.1109/APEDE.2012.6478074
Filename
6478074
Link To Document