• DocumentCode
    3537227
  • Title

    Silicon precipitation in surface layers of amorphous SI3N4 films with ArF excimer laser

  • Author

    Nakamae, Koji ; Kurosawa, K. ; Sasaki, Wataru ; Takigrawa, Y. ; Kato, Yu ; Okuda, Masumi

  • fYear
    1995
  • fDate
    10-14 July 1995
  • Firstpage
    297
  • Keywords
    Amorphous materials; Gas lasers; Laser ablation; Laser theory; Neodymium; Optical pulses; Pump lasers; Semiconductor films; Silicon; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1995. Technical Digest. CLEO/Pacific Rim'95., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-2400-5
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1995.527291
  • Filename
    527291
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3537227