Wireless magnetic micro-machine of planar structure with magnetic thin film

Magnetic micro-machines are driven by a magnetic field. They require no power supply cables, no batteries, and no controlling systems on the body of the machine. In previous studies, we examined the swimming properties of spiral-type magnetic micro-machines. The micro-machine was composed of a bulk magnet and a spiral structure. To reduce the size of the bulk magnet is not easy. By using magnetic thin film, however, the size of magnetic micro-machines can be reduced to several dozen micro millimeters. At this size, they can be produced using a fine processing technology. In this paper, we fabricated the magnetic micro-machine of planar structure with magnetic thin film. We examined about the performance the micro-machine in the liquid.