DocumentCode
3543474
Title
Multilayer transition-metal dichalcogenide channel Thin-Film Transistors
Author
Eok Su Kim ; Sunkook Kim ; Yun Sung Lee ; Sang Yoon Lee ; Sunhee Lee ; Woong Choi ; Peelaers, H. ; Van de Walle, Chris G. ; Wan-Sik Hwang ; Kosel, T. ; Jena, D.
Author_Institution
Samsung Adv. Inst. of Technol., Samsung Electron., Yongin, South Korea
fYear
2012
fDate
10-13 Dec. 2012
Abstract
We show that multilayered transition-metal dichalcogenides such as multilayer MoS2 present a compelling case for Thin-Film Transistors (TFTs) for large-area display technology. Through a combined structural, optical, and electronic characterization of multilayer MoS2 TFTs, supported by density-functional theory based bandstructure calculations, we show the inherently attractive properties of these materials for such applications. We find that the current modulation of such devices is high, the current saturation is robust, normally-off operation is feasible, effective field-effect mobility at RT exceeds 100 cm2/V.s, and the channel can be operated in both accumulation and inversion modes. These properties make multilayer MoS2 more feasible than single layer versions to maintain processing robustness.
Keywords
molybdenum compounds; thin film transistors; MoS2; RT; TFT; accumulation modes; compelling case; density-functional theory based bandstructure calculations; electronic characterization; field-effect mobility; inversion modes; large-area display technology; multilayer transition-metal dichalcogenide channel thin-film transistors; normally-off operation; optical characterization; single layer versions; structural characterization; Crystals; Current measurement; Educational institutions; Nonhomogeneous media; Semiconductor device measurement; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting (IEDM), 2012 IEEE International
Conference_Location
San Francisco, CA
ISSN
0163-1918
Print_ISBN
978-1-4673-4872-0
Electronic_ISBN
0163-1918
Type
conf
DOI
10.1109/IEDM.2012.6478985
Filename
6478985
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