• DocumentCode
    3543474
  • Title

    Multilayer transition-metal dichalcogenide channel Thin-Film Transistors

  • Author

    Eok Su Kim ; Sunkook Kim ; Yun Sung Lee ; Sang Yoon Lee ; Sunhee Lee ; Woong Choi ; Peelaers, H. ; Van de Walle, Chris G. ; Wan-Sik Hwang ; Kosel, T. ; Jena, D.

  • Author_Institution
    Samsung Adv. Inst. of Technol., Samsung Electron., Yongin, South Korea
  • fYear
    2012
  • fDate
    10-13 Dec. 2012
  • Abstract
    We show that multilayered transition-metal dichalcogenides such as multilayer MoS2 present a compelling case for Thin-Film Transistors (TFTs) for large-area display technology. Through a combined structural, optical, and electronic characterization of multilayer MoS2 TFTs, supported by density-functional theory based bandstructure calculations, we show the inherently attractive properties of these materials for such applications. We find that the current modulation of such devices is high, the current saturation is robust, normally-off operation is feasible, effective field-effect mobility at RT exceeds 100 cm2/V.s, and the channel can be operated in both accumulation and inversion modes. These properties make multilayer MoS2 more feasible than single layer versions to maintain processing robustness.
  • Keywords
    molybdenum compounds; thin film transistors; MoS2; RT; TFT; accumulation modes; compelling case; density-functional theory based bandstructure calculations; electronic characterization; field-effect mobility; inversion modes; large-area display technology; multilayer transition-metal dichalcogenide channel thin-film transistors; normally-off operation; optical characterization; single layer versions; structural characterization; Crystals; Current measurement; Educational institutions; Nonhomogeneous media; Semiconductor device measurement; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2012 IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4673-4872-0
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2012.6478985
  • Filename
    6478985