Postgrowth tuning of cavity resonance for multiple-wavelength laser and detector arrays

Summary form only given. Multiple-wavelength arrays of vertical-cavity lasers (VCLs) and detectors are important for wavelength-division-multiplexing systems. In-plane variation of the cavity resonant wavelength usually requires growth on patterned substrates or two successive growths and a complicated processing. It was recently observed that the lateral wet oxidation of an AlGaAs layer can result in partial vertical oxidation of an adjacent layer. We propose to use this combined lateral-vertical oxidation to change the optical thickness of a cavity after the epitaxial growth of both Bragg mirrors.