• DocumentCode
    3546559
  • Title

    High yield packaging for high-density multi-channel chip integration on flexible parylene substrate

  • Author

    Chang, Jay Han-Chieh ; Kang, Dongyang ; Tai, Yu-Chong

  • Author_Institution
    California Inst. of Technol., Pasadena, CA, USA
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    353
  • Lastpage
    356
  • Abstract
    This paper reports a new chip packaging technique for the assembly of retinal prosthesis device. Here, a photoresist is used as glue to attach a chip to the targeted parylene-C substrate so that 94% of the chip area is used as attachment to prevent delamination. As a validation, chips with 268 connections were used to assess the connection yield. The results show that this new technique, combined with an additional parylene-C coating, provide a high connection yield (>;90%) and is a promising method for high-lead-count implant devices.
  • Keywords
    assembling; delamination; eye; integrated circuit packaging; photoresists; prosthetics; chip packaging technique; connection yield; delamination; flexible parylene substrate; high yield packaging; high-density multichannel chip integration; high-lead-count implant devices; parylene-C coating; photoresist; retinal prosthesis device assembly; targeted parylene-C substrate; Electrodes; Implants; Integrated circuits; Packaging; Resists; Retina; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170160
  • Filename
    6170160