• DocumentCode
    3546850
  • Title

    A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model´s frequency scaling

  • Author

    Liewald, J. -T ; Kuhlmann, B. ; Balslink, T. ; Manoli, Y.

  • Author_Institution
    Automotive Electron., Robert BOSCH GmbH, Stuttgart, Germany
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    492
  • Lastpage
    495
  • Abstract
    The working frequency f0 of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f0 we designed a new device with f0=100 kHz. Key parameters of the 100 kHz device are theoretically and experimentally compared with those of a 15 kHz reference sensor. The experimental results show the validity of the theoretical frequency scaling of the key parameters. The measurements show benefits and disadvantages of MEMS vibratory gyroscopes with increased f0>;>;30 kHz.
  • Keywords
    angular velocity measurement; gyroscopes; microsensors; MEMS angular rate sensors; MEMS vibratory gyroscopes; frequency 100 kHz; frequency 15 kHz; frequency scaling; system model; Frequency measurement; Gyroscopes; Micromechanical devices; Oscillators; Resonant frequency; Sensitivity; Sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170245
  • Filename
    6170245
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3546850