DocumentCode
3546873
Title
Integration of EWOD pumping device in deep microfluidic channels using a three-dimensional shadowmask
Author
Morishita, S. ; Kubota, M. ; Mita, Y.
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
1045
Lastpage
1048
Abstract
A droplet propulsion system based on the electrowetting-on-dielectric (EWOD) is integrated in deep-trench microfluidic channels. Due to the unique three-dimensional multi-height silicon shadowmask, electrodes are simultaneously fabricated on the top, bottom and vertical walls of deep channels, thus enabling three-face EWOD driving by both the bottom and sidewalls. We have successfully moved a water droplet in a 230μm-deep, 750μm-wide trench by EWOD.
Keywords
microchannel flow; pumps; silicon; EWOD pumping device; deep-trench microfluidic channels; electrowetting-on-dielectric; size 230 mum; size 750 mum; three-dimensional multiheight silicon shadowmask; water droplet; Electrodes; Force; Lab-on-a-chip; Lithography; Microfluidics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170250
Filename
6170250
Link To Document