Multi-spectral tunable excitation fluorescence microscopy with a nanoimprinted PDMS-on-silicon grating optical filter

Author

Huang, N.-T. ; Truxal, S. ; Tung, Y. -C ; Kurabayashi, K.

Author_Institution

Univ. of Michigan, Ann Arbor, MI, USA

fYear

2012

fDate

Jan. 29 2012-Feb. 2 2012

Firstpage

648

Lastpage

651

Abstract

We report a MEMS-based tunable grating optical filter device and its integration with a fluorescence microscope system. This integration allows for voltage-controlled wavelength tuning of excitation light from a multi-band source. We demonstrate the system´s capability to selectively excite fluorescence protein molecules with different excitation/emission spectral characteristics using a chip of optical filter device arrays, each with a very small (2mm × 2 mm) footprint. The demonstrated technology has potential to enable massively-parallel multispectral fluorescence microscopy in biochip array settings.

Keywords

fluorescence; optical filters; optical microscopy; optical tuning; MEMS based tunable grating optical filter; biochip array settings; excitation/emission spectral characteristics; fluorescence microscope system; fluorescence protein molecules; multi spectral tunable excitation fluorescence microscopy; nanoimprinted PDMS on silicon grating optical filter; voltage controlled wavelength tuning; Fluorescence; Gratings; Laser excitation; Laser tuning; Optical filters; Optical imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Conference_Location

Paris

ISSN

1084-6999

Print_ISBN

978-1-4673-0324-8

Type

conf

DOI

10.1109/MEMSYS.2012.6170270

Filename

6170270