DocumentCode
3546968
Title
Self-aligned VCSEL-microlens scanner with large scan range
Author
Quack, N. ; Chou, J.B. ; Wu, M.C.
Author_Institution
Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, CA, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
656
Lastpage
659
Abstract
This paper reports on the design, fabrication and optical characterization of a self-aligned microlaser scanning system consisting of a vertical cavity surface emitting laser (VCSEL) source and a MEMS-actuated microlens scanner. The alignment and the spacing between the VCSEL and the MEMS scanner are achieved through lithographically patterned alignment grooves and precision micro-beads. Horizontal displacements of ±70 μm, corresponding to scanning angles of ±7°, have been demonstrated.
Keywords
microactuators; microlenses; optical design techniques; optical fabrication; optical scanners; surface emitting lasers; MEMS actuated microlens scanner; large scan range; optical characterization; optical design; optical fabrication; self aligned VCSEL microlens scanner; self aligned microlaser scanning system; vertical cavity surface emitting laser; Actuators; Assembly; Laser beams; Lenses; Micromechanical devices; Suspensions; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170272
Filename
6170272
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