DocumentCode
3546976
Title
1.12GHz Opto-Acoustic Oscillator
Author
Sridaran, Suresh ; Bhave, Sunil A.
Author_Institution
Cornell Univ., Ithaca, NY, USA
fYear
2012
fDate
Jan. 29 2012-Feb. 2 2012
Firstpage
664
Lastpage
667
Abstract
We report on the development of a GHz Opto-Acoustic Oscillator (OAO) using an air gap capacitively actuated silicon optomechanical resonator. An optical sensing technique using optomechanical ring resonators in silicon allows for observation of the mechanical resonances of electrostatically excited resonators up to 3.5GHz. Using amplifiers to compensate for losses, we demonstrate an oscillator operating at 1.12GHz with 8.8dBm output RF power and a phase noise of -85 dBc/Hz at 10 kHz offset.
Keywords
electrostatic devices; micro-optomechanical devices; microactuators; micromechanical resonators; optical resonators; oscillators; Si; air gap; capacitively actuated optomechanical resonator; electrostatically excited resonators; frequency 1.12 GHz; mechanical resonance; optical sensing technique; opto-acoustic oscillator; optomechanical ring resonators; Optical imaging; Optical modulation; Optical ring resonators; Optical sensors; Oscillators; Resonant frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Conference_Location
Paris
ISSN
1084-6999
Print_ISBN
978-1-4673-0324-8
Type
conf
DOI
10.1109/MEMSYS.2012.6170274
Filename
6170274
Link To Document