Preparation of a micro glass microfluidic device by a Chemical Foaming Process for applications of a focus ultrasonic transducer

In this study, we will propose a novel micro glass microfluidic device as a focus ultrasonic transducer for the application of breaking DNA or cell into pieces. A novel process of Chemical Foaming Process (CFP) will be briefly introduced. And glass bubble shells array was prepared by this process as resonators. Results show that spherical shells arrays with smooth wall surface were successfully prepared. Simulation results of the resonance properties of this spherical structure, which are in the ultrasonic range, were also presented, including the relationship between geometric dimensions of the shells and resonant frequency. Vibration properties were also tested, which show well correspondence. Then, a focus ultrasonic transducer using glass bubble as resonator driven by the Lorentz force was prepared and characterized.