• DocumentCode
    3547418
  • Title

    Electromagnetic energy harvester by using buried NdFeB

  • Author

    Miki, S. ; Fujita, T. ; Kotoge, T. ; Jiang, Y.G. ; Uehara, M. ; Kanda, K. ; Higuchi, K. ; Maenaka, K.

  • Author_Institution
    Univ. of Hyogo, Himeji, Japan
  • fYear
    2012
  • fDate
    Jan. 29 2012-Feb. 2 2012
  • Firstpage
    1221
  • Lastpage
    1224
  • Abstract
    This study describes the fabrication and measurement of an electromagnetic-type energy harvester by using buried NdFeB/Ta multilayer films. The energy harvester is fabricated by bonding a vibratory mass with buried micro-magnets and a stator with integrated micro-coils together. The performance of the micro-magnets was enhanced by new methods of a mechanical polishing process of buried NdFeB. The output power of the energy harvester was improved to 760 pW with an applied vibration amplitude of 48 μmp-p at 94.9 Hz.
  • Keywords
    energy harvesting; films; polishing; vibrations; NdFeB; electromagnetic-type energy harvester; integrated microcoils; mechanical polishing process; micromagnets; multilayer films; vibration amplitude; vibratory mass; Fabrication; Magnetic films; Magnetic flux; Magnetic multilayers; Magnetic resonance imaging; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
  • Conference_Location
    Paris
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4673-0324-8
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2012.6170409
  • Filename
    6170409
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3547418