DocumentCode
3554880
Title
A new structure for VLSI bipolar technology
Author
Seegebrecht, Peter K. ; Kim, Wonchan
Author_Institution
Institut für Theoretische Elektrotechnik der RWTH-Aachen, Aachen, West-Germany
Volume
25
fYear
1979
fDate
1979
Firstpage
184
Lastpage
187
Abstract
A novel bipolar process which is complementary to the collector diffused isolation (CDI) process but compatible with the standard buried collector (SBC) process will be presented. The application of it to ECL. and I2L circuits show the advantages of small circuit size and improved performance.
Keywords
Circuit testing; Coupling circuits; Doping; Electrical resistance measurement; Fabrication; Isolation technology; Logic circuits; Resistors; Transistors; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1979 Internationa
Type
conf
DOI
10.1109/IEDM.1979.189574
Filename
1480439
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