Low dielectric constant interconnect technology-a paradigm for interdisciplinary industry-university programs

A multidisciplinary vertically integrated and professional-interactive industry-university research program is described. Unique features of the program include joint definition (and guidance) of research directions and priorities, extensive interactions between university and industry researchers within similar disciplines, and extensive on-campus interaction between the disciplines involved. While the research program in ongoing, the authors believe that the successful interactions and research results to date indicate that a new paradigm for sizably scaled interdisciplinary industry-university programs is being established