DocumentCode
3555325
Title
Characterization of two step impact ionization and its influence in NMOS and PMOS VLSI´s
Author
Matsunaga, J. ; Momose, Hiroshi ; Iizuka, Hisakazu ; Kohyama, SusumuK
Author_Institution
Toshiba Corporation, Kawasaki, Japan
Volume
26
fYear
1980
fDate
1980
Firstpage
736
Lastpage
739
Abstract
Two step impact ionization phenomena near the high electric field drain region are characterized, both theoretically and experimentally, in small geometry NMOS and PMOS structures. Influences of primary and secondary impact ionized carrier flows are quantitatively considered as design constraints in high density MOS memories, more specifically for CMOS devices and also for poly-Si resistor load RAM cells.
Keywords
Current measurement; Geometry; Impact ionization; Intrusion detection; MOS devices; Resistors; Semiconductor devices; Silicon; Substrates; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1980 International
Type
conf
DOI
10.1109/IEDM.1980.189942
Filename
1481385
Link To Document