DocumentCode
3555760
Title
Capacitance transient analysis of (Hg,Cd)Te MIS structures
Author
Hartle, N.M. ; Zimmermann, P.H.
Author_Institution
Honeywell Electro-Optics Operations, Lexington, MA
Volume
28
fYear
1982
fDate
1982
Firstpage
141
Lastpage
144
Abstract
New theoretical and experimental results are presented on the utility of the capacitance transient response Hg1-x Cdx Te Metal Insulator Semiconductor structures for the measurement of So . Two types of MIS structures are investigated: single and dual gate. For the single gate case, we have performed a complete numerical analysis of the capacitance transient response to a depleting voltage step which shows that the surface current component decays in 10-7s for silicon at 300K and in 10-10s for HgCdTe at 77K for reasonable values of so . Capacitance transients cannot be resolved by standard ac measurement techniques at these time scales. This limitation has not been fully recognized previously. To circumvent the limitations of the pulsed single gate MIS technique a dual gate MIS structure consisting of two concentric electrically isolated metal gate electrodes was developed for (Hg1-x Cdx )Te. A subtraction technique using different bias conditions allows the surface current component to be accurately measured. Dual gate measurements on n-type Hg.63 Cd.37 Te resulted in a determination of so between 30 and 300 cm/s for an anodic oxide -(Hg,Cd)Te interface.
Keywords
Capacitance measurement; Insulation; Mercury (metals); Metal-insulator structures; Numerical analysis; Silicon; Tellurium; Transient analysis; Transient response; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1982 International
Type
conf
DOI
10.1109/IEDM.1982.190235
Filename
1482769
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