• DocumentCode
    3556319
  • Title

    Session 21 Computer automated manufacturing of integrated circuits

  • Author

    Shott, J. ; Reid, B.

  • Author_Institution
    Stanford University, Stanford, CA
  • fYear
    1984
  • fDate
    9-12 Dec. 1984
  • Firstpage
    539
  • Lastpage
    539
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1984 International
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1984.190773
  • Filename
    1484544
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3556319