DocumentCode
3556566
Title
A full three-dimensional simulation on alpha-particle induced DRAM soft-errors
Author
Masuda, Hiroji ; Toyabe, Toru ; Shukuri, Hiroko ; Ohshima, Kazuyoshi ; Itoh, Kenji ; Itoh, Kiyoo
Author_Institution
Hitachi Ltd., Tokyo, Japan
Volume
31
fYear
1985
fDate
1985
Firstpage
496
Lastpage
499
Abstract
Numerical device, modeling is one of the most promising VLSI device design methods developed thus for in the sub-um era. This paper describes a full three-dimensional numerical modeling of alpha-particle-induced DRAM soft-error phenomena. The three-dimensional simulation results were verified using test chip measurement in Am
Keywords
Charge carrier processes; Computational modeling; Costs; Integral equations; Noise measurement; Physics; Poisson equations; Random access memory; Silicon; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1985 International
Type
conf
DOI
10.1109/IEDM.1985.191012
Filename
1485562
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