The integration of micro-machine fabrication with electronic device fabrication on III-V semiconductor materials

The authors have fabricated a variety of micromechanical devices on GaAs and InP substrates, using fabrication methods and materials compatible with microelectronic device fabrication on III-V compounds. The actuators are electrostatically operated and include microwave switches, linear actuated microwave tuners, and rotating element motors. The authors describe the types of mechanical devices that have been fabricated, the fabrication strategy, sequence, methods, and materials used in the fabrication, the compatibility of processes with III-V based devices, and some evaluations of their mechanical and electrical properties.<>