DocumentCode
3560638
Title
Electron Current From an RF Microdielectric Barrier Discharge
Author
Wang, Jun-Chieh ; Leoni, Napoleon ; Birecki, Henryk ; Gila, Omer ; Kushner, Mark J.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
Volume
39
Issue
11
fYear
2011
Firstpage
2168
Lastpage
2169
Abstract
Nonarcing microdielectric barrier discharges (mDBDs) using radio-frequency excitation are attractive in that the arrays of devices can be inexpensively produced to generate surface sources of plasma or radicals. Images of the time evolution of electron extraction from an mDBD sustained in atmospheric-pressure N2 are presented.
Keywords
high-frequency discharges; nitrogen; plasma dielectric properties; plasma sources; plasma transport processes; N2; atmospheric-pressure N2; electron current; electron extraction; nonarcing microdielectric barrier discharges; pressure 1 atm; radiofrequency excitation; surface sources; Cavity resonators; Dielectrics; Discharges; Electric potential; Electrodes; Plasmas; Radio frequency; Dielectric barrier discharge; microplasma;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
Conference_Location
4/21/2011 12:00:00 AM
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2126606
Filename
5753949
Link To Document