Parametric model extraction for MEMS based on variational finite element techniques

This article is focused on new finite element technologies which account for parameter variations in a single finite element run. The key idea of the new approach is to compute not only the governing system matrices of the FE problem but also n high order partial derivatives with regard to design parameters by means of automatic differentiation (AD). As result, Taylor vectors of the system´s response can be expanded in the vicinity of the initial position capturing dimensions and physical parameter. Essential speed-up can be achieved for shape optimization, sensitivity analyses and data sampling needed for reduced order modeling of MEMS.