Experimental demonstration of a stacked SOI multiband charged-coupled device

Author

Chu-En Chang ; Segal, Julie D. ; Roodman, Aaron J. ; Kenney, Christopher J. ; Howe, Roger T.

Author_Institution

Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA

fYear

2014

Abstract

The multiband charge-coupled device (CCD) is a polychromatic image sensor fabricated on semiconductor-on-insulator substrates with multiple device layers. It can achieve a multifold improvement in efficiency compared to a conventional CCD, because photons are collected and resolved in the substrate without external optics. We present the first experimental demonstration of multiband light absorption and charge extraction for a single-pixel device. The ratio of the active layers´ responsivities changes with wavelength, indicating that incident color information is captured in the multiple device layers.

Keywords

charge-coupled devices; image sensors; light absorption; silicon-on-insulator; CCD; active layer responsivities; charge extraction; incident color information; multiband light absorption; multiple device layers; polychromatic image sensor; semiconductor-on-insulator substrates; single-pixel device; stacked SOI multiband charged-coupled device; Charge coupled devices; Image color analysis; Light emitting diodes; Optical crosstalk; Optical device fabrication; Optical filters; Optical sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting (IEDM), 2014 IEEE International

Type

conf

DOI

10.1109/IEDM.2014.7046983

Filename

7046983