• DocumentCode
    3565089
  • Title

    Future challenges and opportunities for heterogeneous process technology. Towards the thin films, Zero Intrinsic Variability devices, Zero Power era

  • Author

    Deleonibus, S. ; Faynot, O. ; Ernst, T. ; Vinet, M. ; Batude, P. ; Andrieu, F. ; Weber, O. ; Cooper, D. ; Bertin, F. ; Moriceau, H. ; DiCioccio, L. ; Signamarcheix, T. ; Sanquer, M. ; Jehl, X. ; Cueto, O. ; Fanet, H. ; Martin, F. ; Okuno, H. ; Nemouchi, F

  • Author_Institution
    CEA, Univ. Grenoble Alpes, Grenoble, France
  • fYear
    2014
  • Abstract
    Linear scaling CMOS has encountered many hurdles which request new process modules, driven mainly by the maximization of energy efficiency. Fabrication at the sub 10nm node level will request Intrinsic Variability approaching to zero. The rapid growth of mobile, multifunctional and autonomous systems is hardly demanding to reach Zero Power consumption. The solutions to integrate Thin Film based devices, architectures and systems in order to face these challenges are described.
  • Keywords
    CMOS integrated circuits; optimisation; thin film devices; autonomous system; energy efficiency; heterogeneous process technology; linear scaling CMOS; maximization; mobile system; multifunctional system; size 10 nm; thin film; zero intrinsic variability device; zero power consumption era; CMOS integrated circuits; Energy efficiency; Power demand; Sensors; Silicon; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2014 IEEE International
  • Type

    conf

  • DOI
    10.1109/IEDM.2014.7047015
  • Filename
    7047015