• DocumentCode
    3565130
  • Title

    Large-scale fabrication of graphene-based electronic and MEMS devices

  • Author

    Debin Wang ; He Tian ; Martin-Fernandez, I?±igo ; Yi Yang ; Tian-Ling Ren ; Yuegang Zhang

  • Author_Institution
    Lawrence Berkeley Nat. Lab., Berkeley, CA, USA
  • fYear
    2014
  • Abstract
    Graphene has been demonstrated great potential in electronic and optoelectronic applications. However, the zero band gap of graphene leads to the low on/off ratio in field effect transistors (FETs) and low optical wavelength selectivity in photo detectors. Moreover, the commonly used wet-transfer process for chemical vapor deposited (CVD) graphene could introduce contamination and defects that degrade the graphene device´s performance. These problems could be resolved if we could find a graphene ribbon fabrication method that could precisely control the width, edge structure, as well as registries (location, orientation) on the substrates. Here, we will showcase recent works on novel transfer-free and contaminant-free CVD methods for direct-growth of graphene nanoribbons and microribbons on dielectric substrates.
  • Keywords
    chemical vapour deposition; field effect transistors; graphene devices; micromechanical devices; photodetectors; C; CVD graphene; FET; MEMS devices; chemical vapor deposited graphene; contaminant-free CVD methods; dielectric substrates; field effect transistors; graphene microribbons; graphene nanoribbons; graphene ribbon; graphene-based electronic; large scale fabrication; low optical wavelength selectivity; photodetectors; transfer-free CVD methods; wet transfer process; zero band gap; Fabrication; Films; Graphene; Nickel; Photodetectors; Substrates; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2014 IEEE International
  • Type

    conf

  • DOI
    10.1109/IEDM.2014.7047056
  • Filename
    7047056