• DocumentCode
    3565748
  • Title

    Surface-grating-based distributed feedback lasers fabricated using nanoimprint lithography

  • Author

    Viheri?¤l?¤, J. ; Laakso, A. ; Dumitrescu, M. ; Tommila, J. ; Haring, K. ; Leinonen, T. ; Ranta, S. ; Pessa, M.

  • Author_Institution
    Optoelectron. Res. Centre, Tampere Univ. of Technol., Tampere
  • Volume
    1
  • fYear
    2008
  • Firstpage
    95
  • Lastpage
    98
  • Abstract
    Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.
  • Keywords
    diffraction gratings; distributed feedback lasers; nanolithography; soft lithography; distributed feedback lasers; nanoimprint lithography; ridge waveguide; third-order surface gratings; wavelength 980 nm; Corrugated surfaces; Distributed feedback devices; Etching; Gratings; Laser feedback; Nanolithography; Optical surface waves; Optical waveguides; Surface emitting lasers; Waveguide lasers; distributed feedback lasers; nanoimprint lithography; surface gratings;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2008. CAS 2008. International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-2004-9
  • Type

    conf

  • DOI
    10.1109/SMICND.2008.4703337
  • Filename
    4703337
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3565748