• DocumentCode
    3572929
  • Title

    Research on the control system of the active isolation system

  • Author

    Yun Liu ; Junli Li ; Yuebin Zhu

  • Author_Institution
    Mech. Eng. Dept., Shanghai Micro Electron. Equip. Co., Ltd., Shanghai, China
  • fYear
    2014
  • Firstpage
    2536
  • Lastpage
    2539
  • Abstract
    Generally, feedback control is used to reduce the resonances of the isolator and floor feedforward control is added to improve the transmissibility further. The manual iterative method is used to calibrate the gain of the floor feedforward control. This method is time-consumed and not easy to tune. A new calibration method which is based on transmissibility and force mobility is proposed. The test results show that the proposed method works well.
  • Keywords
    calibration; feedback; feedforward; vibration isolation; active isolation system; control system; feedback control; floor feedforward control gain calibration; force mobility; isolator resonance reduction; iterative method; transmissibility improvement; Automation; Control systems; Electronic equipment; Feedforward neural networks; Floors; Intelligent control; Mechanical engineering; active control; floor feedforward; isolator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Control and Automation (WCICA), 2014 11th World Congress on
  • Type

    conf

  • DOI
    10.1109/WCICA.2014.7053123
  • Filename
    7053123
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3572929