DocumentCode
357312
Title
Evaluation of lot release policies for semiconductor manufacturing systems
Author
Sandell, Raka ; Srinivasan, Krishna
Author_Institution
Motorola Inc.
fYear
1996
fDate
1996
Firstpage
1014
Lastpage
1022
Keywords
Application specific integrated circuits; Integrated circuit measurements; Job shop scheduling; Manufacturing industries; Manufacturing systems; Optimal scheduling; Pollution measurement; Production facilities; Semiconductor device manufacture; Throughput;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN
0-7803-3383-7
Type
conf
DOI
10.1109/WSC.1996.873398
Filename
873398
Link To Document