DocumentCode
357313
Title
An investigation of operating methods for 0.25 micron semiconductor manufacturing
Author
Hallas, James F. ; Kim, Jane D. ; Mosier, Charles T. ; Internicola, Carolyn
Author_Institution
Texas Instruments
fYear
1996
fDate
1996
Firstpage
1023
Lastpage
1030
Keywords
Costs; Fabrication; Management training; Measurement; Production facilities; Productivity; Qualifications; Semiconductor device manufacture; Semiconductor device modeling; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference, 1996. Proceedings. Winter
Print_ISBN
0-7803-3383-7
Type
conf
DOI
10.1109/WSC.1996.873399
Filename
873399
Link To Document