On-Wafer Calibration of Sol-Gel Derived Bulk Acoustic Wave Devices

This paper reports recent advances obtained with bulk acoustic wave resonators fabricated using sol-gel thin film transducers. The relative permittivity of the films were observed to decrease with frequency, an effect we believe is due to relaxation associated with domain switching. The effects of parasitics at high frequencies were minimized using an on-wafer calibration scheme which was verified by impedance standards supplied by the probe manufacturer and also with verification elements realized on the sol-gel films themselves.