High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system

This paper presents the design and experimental implementation of an adaptive sliding mode control scheme for a 2D MEMS micromirror with sidewall electrodes(SW), a closed-loop controlled 2D micromirror-based laser scanning microscope system is developed based on NI field-programmable gate array (FPGA) hardware, 2D image of the scanned target are obtained. Controller implementation, image acquisition and display are performed with LABVIEW software through the FPGA card. Compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the Y-to-X cross-axis effect and achieve accurate tracking of a reference triangular signal. The scanning performance is significantly improved, and better 2D image of target is obtained using the micromirror with the proposed scheme.