Design and simulation of multi-beam RF MEMS varactor

Modern wireless communication systems require high quality Varactors exhibiting wide tuning range at GigaHertz level. Varactors implemented using micro mechanical systems show superior performance compared to their semiconductor counterparts. Parallel plate varactors are simplest to implement and give higher capacitance range compared to the other types of MEMS varactors. Parallel plate varactors have been used with multiple beam architecture in order to improve the performance parameters such as tuning range and quality factor. The Multiple beam Structure proposed here increases the capacitance range and hence increases the Tuning Range of the varactor. The capacitance Range is increased from 0.064pF from a single beam structure to 0.448 pF for a seven beam structure.