Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Author

Takaya, Yasuhiro ; Michihata, Masaki ; Hayashi, Terutake

Author_Institution

Dept. of Mech. Eng., Osaka Univ., Suita, Japan

fYear

2014

Firstpage

200

Lastpage

204

Abstract

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

Keywords

antireflection coatings; lenses; light scattering; optical glass; surface topography; 3D-scattering measurement system; light scattering; platinum-coated glass lens mold; total angle resolved scattering characterization; ultra-fine finished surface areal-topography; Lenses; Optical surface waves; Rough surfaces; Scattering; Surface roughness; Surface topography; Surface treatment; areal-topography; glass lens mold; laser light scattering; surface inspection; total angle-resolved scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Optomechatronic Technologies (ISOT), 2014 International Symposium on

Type

conf

DOI

10.1109/ISOT.2014.55

Filename

7119419