DocumentCode
3594439
Title
Enabling circuit design using FinFETs through close ecosystem collaboration
Author
Sheu, Bing J. ; Chih-Sheng Chang ; Yen-Huei Chen ; Ken Wang ; Kuo-Ji Chen ; Yung-Chow Peng ; Li-Chun Tien ; Ming-Hsiang Song ; Hou, Chunping ; Sun, Jack Y.-C ; Chenming Hu
Author_Institution
TSMC, Hsinchu, Taiwan
fYear
2013
Abstract
Double-patterning lithography is required at 20 nm node for planar CMOS. At the 16 / 14 nm node, in order to deliver attractive amount of Performance-Power-Area enhancement, 3-D FinFETs are required. Close collaboration at design ecosystem among fabrication foundry, EDA vendors, IP vendors, packaging vendors, and design houses is crucial for successful migration to FinFET circuits. This paper describes key issues in enabling circuit design using FinFETs and how to address them effectively.
Keywords
CAD; CMOS integrated circuits; MOSFET; lithography; network synthesis; semiconductor device packaging; 3D FinFET circuit; CAD tool; EDA vendor; IP vendor; Performance-Power-Area enhancement; circuit design; close ecosystem collaboration; design ecosystem; double-patterning lithography; fabrication foundry; packaging vendor; planar CMOS; size 20 nm; CMOS integrated circuits; Doping; FinFETs; Integrated circuit modeling; Logic gates; Semiconductor device modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology (VLSIT), 2013 Symposium on
ISSN
0743-1562
Print_ISBN
978-1-4673-5226-0
Type
conf
Filename
6576615
Link To Document