DocumentCode
3596600
Title
Improved structural quality of GaN nanowall network grown on pre-nitrided c-sapphire
Author
Thakur, Varun ; Nayak, Sanjay Kumar ; Nagaraja, K.K. ; Shivaprasad, S.M.
Author_Institution
Chem. & Phys. of Mater. Unit, JNCASR, Bangalore, India
fYear
2014
Firstpage
1
Lastpage
4
Abstract
In the present study, GaN nanowall network (NWN) structures are grown using rf-plasma assisted molecular beam epitaxy (PA-MBE) system under highly nitrogen rich conditions over nitrided and bare c-plane sapphire substrates. Nitridation is carried out prior to growth for two of the samples and its effect on the crystal quality of the resultant nanowall structure is studied and compared with the same structure grown on bare sapphire. It is found that nitriding the c-plane sapphire prior to growth results in an improvement of crystalline quality of the resulting nanowall as observed by the reduction in FWHM of (0002) XRC.
Keywords
III-V semiconductors; gallium compounds; molecular beam epitaxial growth; nanofabrication; nanostructured materials; nitridation; plasma deposition; semiconductor epitaxial layers; semiconductor growth; wide band gap semiconductors; (0002) XRC; Al2O3; FWHM; GaN; crystal quality; nanowall network structures; nitridation; nitrogen rich conditions; prenitrided c-sapphire substrates; rf-plasma assisted molecular beam epitaxy system; structural quality; Films; Gallium nitride; Lattices; Nanostructures; Strain; Stress; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Emerging Electronics (ICEE), 2014 IEEE 2nd International Conference on
Print_ISBN
978-1-4673-6527-7
Type
conf
DOI
10.1109/ICEmElec.2014.7151177
Filename
7151177
Link To Document