• DocumentCode
    3596600
  • Title

    Improved structural quality of GaN nanowall network grown on pre-nitrided c-sapphire

  • Author

    Thakur, Varun ; Nayak, Sanjay Kumar ; Nagaraja, K.K. ; Shivaprasad, S.M.

  • Author_Institution
    Chem. & Phys. of Mater. Unit, JNCASR, Bangalore, India
  • fYear
    2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    In the present study, GaN nanowall network (NWN) structures are grown using rf-plasma assisted molecular beam epitaxy (PA-MBE) system under highly nitrogen rich conditions over nitrided and bare c-plane sapphire substrates. Nitridation is carried out prior to growth for two of the samples and its effect on the crystal quality of the resultant nanowall structure is studied and compared with the same structure grown on bare sapphire. It is found that nitriding the c-plane sapphire prior to growth results in an improvement of crystalline quality of the resulting nanowall as observed by the reduction in FWHM of (0002) XRC.
  • Keywords
    III-V semiconductors; gallium compounds; molecular beam epitaxial growth; nanofabrication; nanostructured materials; nitridation; plasma deposition; semiconductor epitaxial layers; semiconductor growth; wide band gap semiconductors; (0002) XRC; Al2O3; FWHM; GaN; crystal quality; nanowall network structures; nitridation; nitrogen rich conditions; prenitrided c-sapphire substrates; rf-plasma assisted molecular beam epitaxy system; structural quality; Films; Gallium nitride; Lattices; Nanostructures; Strain; Stress; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Electronics (ICEE), 2014 IEEE 2nd International Conference on
  • Print_ISBN
    978-1-4673-6527-7
  • Type

    conf

  • DOI
    10.1109/ICEmElec.2014.7151177
  • Filename
    7151177