New dynamic scanning force microscopes using piezoelectric PZT microcantilevers

Author

Itoh, Toshihiro ; Chu, Jiaru ; Misumi, Ichiko ; Kataoka, Kenichi ; Suga, Tadatomo

Author_Institution

Res. Center for Adv. Sci. & Technol., Tokyo Univ., Japan

Volume

1

fYear

1997

Firstpage

459

Abstract

Piezoelectric cantilevers have made it possible to build new scanning force microscopes (SFMs) which are simple, compact and easy to operate, because they have self-sensing, self-exciting and self-deflection controlling abilities. Specifically, since they can directly be excited by applying ac voltage to the piezoelectric layer, new types of dynamic SFMs are expected to be developed using them. In this paper, we describe a new dynamic SFM in liquid and a new dynamic contact mode SFM using piezoelectric microcantilevers with sol-gel derived PZT thin film

Keywords

atomic force microscopy; micromechanical devices; piezoelectric devices; piezoelectric thin films; semiconductor technology; sol-gel processing; 2-propanol; PZT microcantilevers; Si; dynamic SFM; dynamic contact mode SFM; dynamic scanning force microscopes; ion beam etching; liquid; piezoelectric layer; piezoelectric microcantilevers; resonance spectrum; self-deflection; self-exciting; self-sensing; sol-gel PZT thin film; Biology; Control systems; Electrodes; Force control; Oscillators; Piezoelectric films; Probes; Transmission electron microscopy; Voltage; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.613685

Filename

613685