DocumentCode
3598420
Title
High-precision contouring of rapidly oscillating optical surfaces with two-wavelength single-shot digital holography
Author
Hansel, Thomas ; Steinmeyer, G?¼nter ; Reimann, Klaus ; Grunwald, Ruediger ; Griebner, Uwe
Author_Institution
Max Born Inst. for Nonlinear Opt. & Short-Pulse Spectrosc., Berlin, Germany
fYear
2009
Firstpage
1
Lastpage
2
Abstract
A novel method for contouring of optical surfaces with unprecedented dynamic range is presented. At an object depth >50 mum, surface deformations of a MEMS of some 10 nm are still unambiguously detectable.
Keywords
deformation; holography; micro-optomechanical devices; MEMS; high-precision contour; rapidly oscillating optical surface; size 10 nm; surface deformations; two-wavelength single-shot digital holography; Cameras; Holographic optical components; Holography; Micromechanical devices; Mirrors; Nonlinear optics; Optical filters; Optical pulse shaping; Optical surface waves; Surface reconstruction; (090.1995) Digital holography; (090.4220) Multiplex holography; (320.5540) Pulse shaping;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference. CLEO/QELS 2009. Conference on
Print_ISBN
978-1-55752-869-8
Electronic_ISBN
978-1-55752-869-8
Type
conf
Filename
5225304
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