Integrated statistical process control as a productivity improvement tool

Statistical Process Control (SPC) is typically viewed as a quality assurance tool in modern semiconductor manufacturing. SPC methods such as design of experiments and control charting are commonly used to improve processes and detect changes in a process respectively. Product monitoring and tool control are used to maintain quality but detract from cycle time and tool availability. The competitiveness of the DRAM semiconductor market requires manufactures to continuously and aggressively improve productivity. This paper presents the integration of existing SPC data as a tool to improve productivity while maintaining quality