Properties of microwave discharge in Goubau transmission line

Author

Yefimov, B.P. ; Khorunzhiy, M.O. ; Kuleshov, A.N.

Author_Institution

Usikov Inst. of Radiophys. & Electron., Nat. Acad. of Sci. of Ukraine, Kharkov

fYear

2007

Firstpage

520

Lastpage

521

Abstract

Experimental results of microwave discharge excitation at the edge of single transmission line are presented. The device, which consists of a waveguide, a resonator and coaxial line for energy transmission to Goubau line, is described. The dynamics of plasma formation at the line edge is analyzed by photographic method. Measured discharge temperature allows us to consider plasma formation as erosive discharge that can be used in thin-film processing during the evaporation of heat-resistant material. We consider the mechanism of energy transmission in single line as an excitation of surface plasma polariton.

Keywords

coaxial cables; high-frequency discharges; resonators; waveguides; Goubau transmission line; coaxial line; discharge temperature; heat-resistant materials; microwave discharge properties; photographic method; plasma formation; resonator; surface plasma polariton; thin-film processing; waveguide; Coaxial components; Electromagnetic heating; Microwave devices; Plasma devices; Plasma materials processing; Plasma measurements; Plasma temperature; Plasma waves; Temperature measurement; Transmission lines; Electrical discharge; fine-dispersed layers of refractory metals; metal sublimation process; single-conductor transmission line;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2007 and the 2007 15th International Conference on Terahertz Electronics. IRMMW-THz. Joint 32nd International Conference on

Print_ISBN

978-1-4244-1438-3

Type

conf

DOI

10.1109/ICIMW.2007.4516611

Filename

4516611