DocumentCode
3610256
Title
2016 Lester Eastman Conference on High Performance Devices
Volume
28
Issue
4
fYear
2015
Firstpage
592
Lastpage
592
Abstract
Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2015.2497909
Filename
7327290
Link To Document