DocumentCode
3610260
Title
2016 IEEE International Interconnect Technology Conference (IITC)
Volume
28
Issue
4
fYear
2015
Firstpage
589
Lastpage
589
Abstract
Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2015.2496520
Filename
7327295
Link To Document