• DocumentCode
    3613811
  • Title

    Micromachined coplanar waveguide on GaAs based HFET heterostructures

  • Author

    M. Tomaska;T. Lalinsky;M. Krnac;M. Klasovity;Z. Mozolova;S. Hascik;I. Kostic

  • Author_Institution
    Fac. of Electr. Eng. & Inf. Technol., Slovak Univ. of Technol., Bratislava, Slovakia
  • Volume
    3
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    825
  • Abstract
    The design, fabrication and characterization of microwave transmission structures on thin composite semiconductor/dielectric substrates, technologically compatible with pseudomorphic HFETs, for micromechanical microwave transmitted power sensors are discussed. The AlGaAs/InGaAs/GaAs and InGaP/InGaAs/GaAs HFET structures as supporting layers of micromachined coplanar waveguides for low loss microwave power transmission are compared.
  • Keywords
    "Coplanar waveguides","Gallium arsenide","HEMTs","MODFETs","Semiconductor waveguides","Indium gallium arsenide","Fabrication","Dielectric substrates","Microwave technology","Micromechanical devices"
  • Publisher
    ieee
  • Conference_Titel
    Microwaves, Radar and Wireless Communications, 2002. MIKON-2002. 14th International Conference on
  • Print_ISBN
    83-906662-5-1
  • Type

    conf

  • DOI
    10.1109/MIKON.2002.1017965
  • Filename
    1017965
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3613811