DocumentCode
3615194
Title
Performance limitations of devices and interconnects and possible alternatives for nanoelectronics
Author
K. Saraswat
Author_Institution
Stanford University
fYear
2004
fDate
6/26/1905 12:00:00 AM
Firstpage
327
Lastpage
327
Keywords
"Nanoelectronics","Integrated circuit interconnections","CMOS technology","MOSFET circuits","Conductivity","Semiconductor materials","Semiconductor device manufacture","Silicon","Transistors","Copper"
Publisher
ieee
Conference_Titel
Quality Electronic Design, 2004. Proceedings. 5th International Symposium on
Print_ISBN
0-7695-2093-6
Type
conf
DOI
10.1109/ISQED.2004.1283695
Filename
1283695
Link To Document