Adsorbed mass and resonant frequency fluctuations of a microcantilever caused by adsorption and desorption of particles of two gases

Microcantilever resonant frequency and mass fluctuation caused by adsorption and desorption of surrounding particles in a two-gas atmosphere are considered. Detailed derivations of mass fluctuation power spectral density and frequency fluctuation power spectral density are performed using analytical approach. The analogy between Shockley-Read generation-recombination processes of electrons in solids and adsorption-desorption processes of particles of a two gas atmosphere around the cantilever is shown. Simulation is given for a silicon microcantilever surrounded by nitrogen and hydrogen.