• DocumentCode
    3619443
  • Title

    Advanced self aligned SOI concepts for vertical MOS transistors with ultrashort channel lengths

  • Author

    Th. Aeugle;L. Risch;W. Rosner;Th. Schulz;D. Behammer

  • Author_Institution
    Siemens AG, Germany
  • fYear
    1997
  • fDate
    6/19/1905 12:00:00 AM
  • Firstpage
    628
  • Lastpage
    631
  • Keywords
    "MOSFETs","Lithography","Parasitic capacitance","Doping","CMOS technology","Threshold voltage","Substrates","Availability","Production","CMOS logic circuits"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194507
  • Filename
    1503437
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619443