• DocumentCode
    3619473
  • Title

    Patterning of Pt/RuO2 electrodes for Pb(Zr,Ti)O3 in an Inductively Coupled Cl2/O2 Plasma

  • Author

    S.-G. Park;J.G. Lee;H.S. Jung;M.-S. Jeon;D.-K. Choi

  • Author_Institution
    Inha University, Korea
  • fYear
    1997
  • fDate
    6/19/1905 12:00:00 AM
  • Firstpage
    748
  • Lastpage
    751
  • Keywords
    "Electrodes","Leakage current","Plasma applications","Radio frequency","Plasma materials processing","Capacitors","Semiconductor films","Dry etching","Sputtering","Plasma properties"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1997. Proceeding of the 27th European
  • Print_ISBN
    2-86332-221-4
  • Type

    conf

  • DOI
    10.1109/ESSDERC.1997.194537
  • Filename
    1503467
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619473