DocumentCode
3619510
Title
Using the Self Aligned Field Implant to Design High Voltage Devices in Sub- µm CMOS Technologies
Author
M. Vermandel;J. Doutreloigne;P. Moens;M. Tack
Author_Institution
University of Gent, Belgium
fYear
2000
fDate
6/22/1905 12:00:00 AM
Firstpage
228
Lastpage
231
Keywords
"CMOS technology","Implants","Electric breakdown","Diodes","Microelectronics","Breakdown voltage","CMOS process","Doping","Low voltage","Automotive engineering"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194756
Filename
1503686
Link To Document