• DocumentCode
    3619661
  • Title

    Quasi-Non Volatile Flatband-Voltage Shift in Metal-Oxide-Semiconductor Capacitors with Silicon-Rich-Oxide Dielectric

  • Author

    M. Rosmeulen;E. Sleeckx;K. De Meyer

  • Author_Institution
    IMEC, Leuven, Belgium and KU Leuven, Belgium
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    383
  • Lastpage
    386
  • Keywords
    "Dielectrics","Silicon","Capacitance-voltage characteristics","MOS capacitors","Voltage","Hysteresis","Random access memory","Nanocrystals","Fluid flow","Microelectronics"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2001. Proceeding of the 31st European
  • Print_ISBN
    2-914601-01-8
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2001.195281
  • Filename
    1506663
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619661