• DocumentCode
    3619697
  • Title

    C-MEMS and C-NEMS

  • Author

    M. Madou

  • Author_Institution
    University of California at Irvine
  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    186
  • Lastpage
    186
  • Keywords
    "Resists","Organic materials","Batteries","Lithography","Electrodes","Nanobioscience","DNA","Sensor arrays","Temperature","Micromechanical devices"
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
  • Print_ISBN
    0-7695-2189-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2004.1508943
  • Filename
    1508943
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619697